Samarium Sulfide Based Semiconducting Tenzoresistive Pressure, Force, Strain, Momentum, Transition, Acceleration, Vibration Sensors
Kaminski V.V.
A.F. Ioffe Physico-Technical Institute, 194021 St Petersburg, Russia
Developed on the base of samarium monosulphide (SmS) semiconducting tenzosensitive materials exceed on their parameters all existing materials for tenzoresistive sensors of mechanical values. They distinguish by record sensitivity, minimum temperature resistance coefficient, maximum parameters linearity, high thermal and radiation stability, high technology of thin-film tenzoresistive structures manufacturing.
The sensing element of the offered sensors is the thin-film resistor. It can be deposited on the elastic element of the various mechanical values gauge made from any material withstanding T 300°C, and works in the usual tenzoresistor regime with the following parameters:
| Resistance, R | 50 104 Ohm |
| Base |
0.510 mm |
Tenzosensitivity coefficient,  |
50130 |
Temperature resistancecoefficient,  |
(350) 10-4 K-1 |
The gauges equipped by this resistors have an output signal magnitude up to 1.5 V without amplifying equipment for the power supply voltage 27 V. It is an order higher than in other types of sensors.
The same resistor formed on a glass or sapphire substrate can be used in baroresistor regime for a pulse and hydrostatic pressures measurements from 1 up to 2103 MPa in gaseous, liquid, loose and plastic mediums at temperatures from 4 up to 700 K. Characteristics of the sensing element of this sensors are the following:
Sensitivity to pressure,  |
(1...3) 10-3 MPa-1 |
| Output signal without amplification on 1 V feeds |
0.25...0.75 mV/MPa |
| Speed |
1 mcs |
| Dimensions |
1x0.5x0.1 mm |
Baroresistive sensors of the local stress in concrete, concrete designs and in grounds not having analogs; gases pressure sensors in the channel of a trunk during shot and in the interior combustion drive cylinder are developed. Developing of sensors for stress states monitoring in composite materials and plastics is now in progress.
Sensors of a force, momentum, transition, acceleration and vibration have found a usage in a space industry and are placed aboard of some space objects. They can find broad application in a mechanical engineering, shipbuilding, motor industry, mining industry, geology, construction, production of home appliances and so on. The development is protected by 14 copyright certificates and patents. The increased demand for sensors of physical values is now observed in connection with necessity of lag liquidation in this area from computer facilities development for further automation and control systems development.
Desirable forms of co-operation are joint development and industrial technological line creation for sensing element or any kind of concrete sensor production. The experimental technological line already exists. It is possible carrying out the works on customer sensors reequipment for SmS based tenzoresistors.
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